The District Central Bureau of Statistics, usually releases publication data per sub-district every year.
The data includes statistics on geography, population, facilities and statistical data collected from each village.
This data is then compiled per sub-district for publication.
This Village Statistics data per Sub-district can be utilized for basic research as well as for development plans.

Here is the link to download Village statistics by Subdistrict for Semarang Regency.
Precisely through the Semarang Regency Statistics Agency website.

https://semarangkab.bps.go.id/publication.html

And here is one example of statistical publication data for West Ungaran Sub-district.

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